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NDE Mask Manufacturable Suite
 

Product Features Applications Papers Deployment Guide Contact Us Brochure (PDF)
 
Total solution for mask data preparation(MDP)

NDE (NCS Distributed Environment) is a distributed processing software running on a conventional Linux PC-cluster. Its advanced technology realizes more flexible and scalable distributed processing than PATACON PC-cluster.

On the NDE platform, NDE Mask Manufacturable Suite (NDE-MS) is a software which offers applications required by mask data preparation (MDP) covering post-OPC through pre-mask writing.



NDE-MS application
NDE-MS application

Various applications are available on NDE-MS.

- Fracture
    - Data fracturing (conversion) including various geometry operations
- MRC
    - Mask rule check
- Select
    - Pattern generation based on geometry operations from existing layers
- Pattern-Match
    - Pattern matching based on templates
- SCRD
    - Shot reduction for Curvilinear/Rectilinear shaped pattern
- PEC
    - Proximity effect correction by dose modulation
- MPC
    - Mask process correction by biasing
- EBV
    - Fast, light, and standalone data viewer
Features of NDE Mask Manufacturable Suite
All processing distributed

With PATACON PC-cluster, one single node takes care of preprocessing (import) and post-processing (export). However, with NDE-MS, all processing are distributed to multiple nodes. Moreover, some applications support a pipeline processing which can run the export process simultaneously with it.

All processing distributed

Pipeline
Outstanding scalability
NDE-MS's advanced distributed processing technology realizes outstanding scalability by increasing CPU cores.
 
 
scalability
Plenty of input and output data formats

NDE-MS supports plenty of input and output data formats.

data formats
 
Measurement recipe support

NDE-MS supports a recipe creation for CD-SEM and Registration tools.

Measurement recipe support
Task management

A task submitted by an user is called a session and managed. NDE-MS's flexible task management can run multiple sessions simultaneously. Moreover, while sessions are running, those can be suspended or those priority can be changed.

 
Version management

NDE-MS can switch the version with the other one anytime. For example, a version for production can be set as default, but the other versions can be specified when submitting sessions.

License management

NDE-MS has its own license management so that it does not require a third party's license management system. One license daemon can manage multiple NDE systems, and it can be introduced for a secure environment which allows to use only a specific network port. For those who want to use a third party license management system, NDE-MS also supports FlexLM®.

 
Usage result collection

NDE-MS can collect the number of sessions, processing time, the number of figures, data volume, operating time, down time, and availability in the form of daily report, weekly report, and monthly report. In addition, it can also collect information on a specified session. It helps grasping the operation status and getting information for accounting by this feature.

NDE-SDK

As an optional feature, an API which accesses NDE data base (intermediate file) can be provided as a SDK package. Users can implement their own distributed processing application on NDE.

 
Plenty of utility programs

Plenty of utility programs are available such as data analysis tool of each data format.

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Product Features Applications Papers Deployment Guide Contact Us Brochure (PDF)


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